别名 | HMDS |
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规格或纯度 | 10%二甲苯溶液 |
英文名称 | Hexamethyldisilazane |
产品介绍 |
一般描述 The product is used to augment the adhesion of photoresist on silicon and SiO 2 surfaces. The effectiveness of HMDS on adhesion is correlated with the reactivity of this compound with surface hydroxyl groups to form a new siloxane end produc General Description The product is used to augment the adhesion of photoresist on silicon and SiO 2 surfaces. The effectiveness of HMDS on adhesion is correlated with the reactivity of this compound with surface hydroxyl groups to form a new siloxane end product, i.e. Si-O-Si(CH 3 ) 3 . This newly formed termination on the substrate renders the surface more hydrophobic in character and leads to greater wettability by photoresist. The latter condition is a crucial factor in good bonding. As a result of these altered characteristics due to the surface chemistry, the treated silicon surfaces become highly compatible with both negative and positive photoresists. Application HMDS preparations are generally applied to the silicon wafer while spinning, prior to the application of photoresist. As an alternative procedure, the wafers may be immersed in HMDS preparations and allowed to dry after removal. |
UN Number | 1992 |
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Packing Group | II |
一般危化品 | 一般危化品 |
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象形图 |
Toxic Health Hazard Corrosive Flammable |
信号词 | Danger |
危险声明 |
H335: May cause respiratory irritation H351: Suspected of causing cancer H373: Causes damage to organs through prolonged or repeated exposure H314: Causes severe skin burns and eye damage H412: Harmful to aquatic life with long lasting effects H303: May be harmful if swallowed H226: Flammable liquid and vapor H304: May be fatal if swallowed and enters airways H370: Causes damage to organs H401: Toxic to aquatic life H311+H331: Toxic in contact with skin or if inhaled. |
预防措施声明 | P273,P280,P301+P310,P370+P378,P210,P405,P501,P233,P240,P264,P260,P303+P361+P353,P201,P271,P241,P270,P301+P330+P331,P403+P233,P308+P311,P361,P202,P242,P243,P304+P340+P310 |